• DocumentCode
    3258391
  • Title

    Sensors Microprocessing by Laser Direct Patterning (LDP) for Industrial Production

  • Author

    Ulieru, Dumitru ; Ciuciumis, Alina ; Tantau, Adrian ; Ulieru, Elena

  • Author_Institution
    ROMES S.A., Bucharest
  • Volume
    2
  • fYear
    2006
  • fDate
    27-29 Sept. 2006
  • Firstpage
    379
  • Lastpage
    382
  • Abstract
    The newly developed mask projection process, called laser direct patterning (LDP) is a process for the high volume production with conductive and reflecting sensors. Due to its simple process mechanism it combines precision and economic efficiency. Depending of material, sensors and sensor elements of thin metal films with lines and spaces 15 m are producible. The paper present the principle of laser ablation of thin metal on polymer substrate, also represented the systems engineering and described the selected applications of this technology for industrial manufacturing
  • Keywords
    laser ablation; metals; sensors; systems engineering; industrial production; laser ablation; laser direct patterning; polymer substrate; sensors microprocessing; thin metal; Conducting materials; Inorganic materials; Laser ablation; Optical films; Optical materials; Polymers; Production; Space technology; Systems engineering and theory; Thin film sensors; Laser Direct Patterning; polymer substrates; sensors; sensors elements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    International Semiconductor Conference, 2006
  • Conference_Location
    Sinaia
  • Print_ISBN
    1-4244-0109-7
  • Type

    conf

  • DOI
    10.1109/SMICND.2006.284024
  • Filename
    4063252