Movable Micromirrors - Design and Simulation

Author

Comanescu, Florin ; Tibeica, Catalin ; Esinenco, Dorin ; Purica, Munizer

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest

Volume

2

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

455

Lastpage

458

Abstract

In this paper are presented the results of the simulation for two different types of movable micromirrors on silicon-on-insulator substrate: one thermal actuated based on bimorph layer and the other electrostatic actuated. The response of the micromirrors, consisting in the displacement along z axe was investigated in static and dynamic regime using Coventor and Ansys software taking into account the material parameters and geometry of the structure. The simulation results show that the displacement of 13 mum can be obtained for micromirrors structure based on bimorph actuator with arm length of 60 mum at 80 mV applied voltage. The second structure has a displacement of 11 mum at 40 V applied voltage

Keywords

electrostatic actuators; engineering computing; micromirrors; silicon-on-insulator; 40 V; 60 micron; 80 mV; Ansys software; Coventor; bimorph actuator; bimorph layer; electrostatic actuation; electrostatically actuation; movable micromirrors; silicon-on-insulator substrate; thermal actuation; Actuators; Adaptive optics; Gold; Micromirrors; Mirrors; Optical sensors; Silicon on insulator technology; Thermal expansion; Thermal stresses; Voltage; bimorph layer; electrostatically actuation; micromirror; thermal actuation;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.284044

Filename

4063272