DocumentCode
3259256
Title
The effect of some geometric and packaging process parameters on die metallization failure
Author
Tay, A.A.O. ; Ong, S.H. ; Lim, Y.K.
Author_Institution
Centre for IC Failure Anal. & Reliability, Nat. Univ. of Singapore, Singapore
fYear
1995
fDate
27 Nov-1 Dec 1995
Firstpage
21
Lastpage
26
Abstract
This paper describes an experimental and finite element study of the effect of some geometric and packaging process parameters on die metallization failure during temperature cycling. The geometric parameters studied include die size, die offset, voided die attach and metal-line width, while process parameters include molding temperature, molding pressure and moisture preconditioning. A test chip designed to detect passivation and interlayer dielectric cracking was used to determine the locations on the die where metallization failures occurred. Three-dimensional finite element analyses were performed to determine the stress distribution within the package during temperature cycling. A good correlation between areas of high stress and occurrence of metallization failures was obtained
Keywords
failure analysis; finite element analysis; integrated circuit metallisation; integrated circuit packaging; die metallization failure; geometric parameters; interlayer dielectric cracking; moisture preconditioning; molding; packaging; passivation; stress distribution; temperature cycling; three-dimensional finite element analysis; Dielectrics; Finite element methods; Metallization; Microassembly; Moisture; Packaging; Passivation; Stress; Temperature; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 1995., Proceedings of the 1995 5th International Symposium on the
Print_ISBN
0-7803-2797-7
Type
conf
DOI
10.1109/IPFA.1995.487590
Filename
487590
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