• DocumentCode
    3259256
  • Title

    The effect of some geometric and packaging process parameters on die metallization failure

  • Author

    Tay, A.A.O. ; Ong, S.H. ; Lim, Y.K.

  • Author_Institution
    Centre for IC Failure Anal. & Reliability, Nat. Univ. of Singapore, Singapore
  • fYear
    1995
  • fDate
    27 Nov-1 Dec 1995
  • Firstpage
    21
  • Lastpage
    26
  • Abstract
    This paper describes an experimental and finite element study of the effect of some geometric and packaging process parameters on die metallization failure during temperature cycling. The geometric parameters studied include die size, die offset, voided die attach and metal-line width, while process parameters include molding temperature, molding pressure and moisture preconditioning. A test chip designed to detect passivation and interlayer dielectric cracking was used to determine the locations on the die where metallization failures occurred. Three-dimensional finite element analyses were performed to determine the stress distribution within the package during temperature cycling. A good correlation between areas of high stress and occurrence of metallization failures was obtained
  • Keywords
    failure analysis; finite element analysis; integrated circuit metallisation; integrated circuit packaging; die metallization failure; geometric parameters; interlayer dielectric cracking; moisture preconditioning; molding; packaging; passivation; stress distribution; temperature cycling; three-dimensional finite element analysis; Dielectrics; Finite element methods; Metallization; Microassembly; Moisture; Packaging; Passivation; Stress; Temperature; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 1995., Proceedings of the 1995 5th International Symposium on the
  • Print_ISBN
    0-7803-2797-7
  • Type

    conf

  • DOI
    10.1109/IPFA.1995.487590
  • Filename
    487590