Title :
Dynamic analysis of an XY positioning table
Author :
Fujun Wang ; Cunman Liang ; Zhipeng Ma ; Xingyu Zhao ; Yanling Tian ; Dawei Zhang
Author_Institution :
Sch. of Mech. Eng., Tianjin Univ., Tianjin, China
Abstract :
The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and X-and Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X- and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.
Keywords :
control system synthesis; graph theory; servomechanisms; state-space methods; LVCM; X-axes motion decoupling; X-axes servomechanisms; XY positioning table; Y-axes motion decoupling; Y-axes servomechanisms; bond graph method; controller design; dynamic analysis; dynamic modeling; flexible decoupling mechanism; linear voice coil motors; state space equations; Analytical models; Atmospheric modeling; Coils; Equations; Force; Friction; Mathematical model; Dynamic modeling; bond graph method; positioning;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
DOI :
10.1109/3M-NANO.2013.6737416
