Title :
Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators on nonconventional plastic substrates
Author :
Yi Zou ; Hongtao Lin ; Lan Li ; Danto, Sylvain ; Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu
Author_Institution :
Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
Abstract :
We demonstrated thermal nanoimprint fabrication of photonic devices in chalcogenide glass films on both semiconductor and nonconventional plastic substrates. A high micro-ring intrinsic quality factor of 3 × 105 is achieved at 1550 nm wavelength.
Keywords :
chalcogenide glasses; nanolithography; plastics; resonators; soft lithography; substrate integrated waveguides; substrates; chalcogenide glass films; high microring intrinsic quality factor; nonconventional plastic substrates; photonic devices; semiconductor substrates; thermal nanoimprint fabrication; waveguide resonators; wavelength 1550 nm; Glass; Optical device fabrication; Optical films; Optical resonators; Optical waveguides; Substrates;
Conference_Titel :
Photonics Society Summer Topical Meeting Series, 2013 IEEE
Conference_Location :
Waikoloa, HI
Print_ISBN :
978-1-4673-5059-4
DOI :
10.1109/PHOSST.2013.6614542
