DocumentCode
3264130
Title
Real time RHEED evaluation with the help of image processing
Author
Nemcsics, Ákos ; Csutorás, Márton ; Tényi, Gusztáv ; Sándor, Tamás
Author_Institution
Inst. for Microelectron. & Technol., Obuda Univ., Budapest, Hungary
fYear
2010
fDate
10-11 Sept. 2010
Firstpage
631
Lastpage
633
Abstract
In this paper, the reflection high-energy electron diffraction (RHEED) pattern during the nano structure formation with the help of image processing is investigated. Nowadays, the growth of self-organised nano structures has been intensively investigated. It is very important to understand their growth process and the knowledge about their shape is particularly significant. The growth of these nano structures can be tracked in-situ manner with the help of RHEED. In-situ information about the stage of the process and the shape of the structure has been provided by RHEED. The temporal relation between the formation of the nano structure and the RHEED pattern is rather complicate. The image processing of the RHEED pattern help us to recognize and to interpret the metamorposis of the pattern during the growth process.
Keywords
image recognition; molecular beam epitaxial growth; nanotechnology; physics computing; reflection high energy electron diffraction; shape recognition; diffraction pattern; growth process; image processing; image recognition; in-situ information; pattern metamorposis; real time RHEED evaluation; reflection high energy electron diffraction; self organised nanostructure; structure shape; Diffraction; Gallium; Image processing; Molecular beam epitaxial growth; Nanostructures; Shape; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Systems and Informatics (SISY), 2010 8th International Symposium on
Conference_Location
Subotica
Print_ISBN
978-1-4244-7394-6
Type
conf
DOI
10.1109/SISY.2010.5647195
Filename
5647195
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