• DocumentCode
    3264130
  • Title

    Real time RHEED evaluation with the help of image processing

  • Author

    Nemcsics, Ákos ; Csutorás, Márton ; Tényi, Gusztáv ; Sándor, Tamás

  • Author_Institution
    Inst. for Microelectron. & Technol., Obuda Univ., Budapest, Hungary
  • fYear
    2010
  • fDate
    10-11 Sept. 2010
  • Firstpage
    631
  • Lastpage
    633
  • Abstract
    In this paper, the reflection high-energy electron diffraction (RHEED) pattern during the nano structure formation with the help of image processing is investigated. Nowadays, the growth of self-organised nano structures has been intensively investigated. It is very important to understand their growth process and the knowledge about their shape is particularly significant. The growth of these nano structures can be tracked in-situ manner with the help of RHEED. In-situ information about the stage of the process and the shape of the structure has been provided by RHEED. The temporal relation between the formation of the nano structure and the RHEED pattern is rather complicate. The image processing of the RHEED pattern help us to recognize and to interpret the metamorposis of the pattern during the growth process.
  • Keywords
    image recognition; molecular beam epitaxial growth; nanotechnology; physics computing; reflection high energy electron diffraction; shape recognition; diffraction pattern; growth process; image processing; image recognition; in-situ information; pattern metamorposis; real time RHEED evaluation; reflection high energy electron diffraction; self organised nanostructure; structure shape; Diffraction; Gallium; Image processing; Molecular beam epitaxial growth; Nanostructures; Shape; Three dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Systems and Informatics (SISY), 2010 8th International Symposium on
  • Conference_Location
    Subotica
  • Print_ISBN
    978-1-4244-7394-6
  • Type

    conf

  • DOI
    10.1109/SISY.2010.5647195
  • Filename
    5647195