DocumentCode
3264710
Title
Base driven micromechanical resonators
Author
Bouwstra, S. ; Tilmans, H.A.C. ; Selvakumar, A. ; Najafi, K.
Author_Institution
MESA Res. Unit, Twente Univ., Enschede, Netherlands
fYear
1992
fDate
22-25 June 1992
Firstpage
148
Lastpage
152
Abstract
A novel approach for excitation and detection of micromechanical structures is presented, which makes use of base drive. Test samples for translating base drive make use of piezoelectric excitation and detection, while test samples for bending base drive make use of thermal excitation and piezoresistive detection. Both alternatives are modeled and tested.<>
Keywords
electric sensing devices; micromechanical devices; piezoelectric transducers; resonators; micromechanical resonators; micromechanical structures; piezoelectric excitation; piezoresistive detection; thermal excitation; translating base drive; Actuators; Circuit testing; Damping; Drives; Mechanical factors; Mechanical sensors; Micromechanical devices; Piezoresistance; Shape; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Print_ISBN
0-7803-0456-X
Type
conf
DOI
10.1109/SOLSEN.1992.228304
Filename
228304
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