Title :
The study on a voltage controlled capacitor with complex membrane
Author :
Wei, Jia ; Liu, Zewen ; Fang, Jie ; Xue Dong Liang ; Liu, Litian ; Li, Zhijian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A study on the design and fabrication of a three-paired-electrodes voltage controlled capacitor (VCC) with complex membrane on a high-resistivity silicon substrate is reported. The complex membrane is composed of 0.8 micron Al and 0.15 micron SiON realized using sputtering and the PECVD process. The suspended membrane structure is obtained with polyimide as the sacrificial layer. The fabricated device was measured and survived for more than 1 million actuation times.
Keywords :
aluminium; capacitors; chemical vapour deposition; membranes; micromechanical devices; silicon; silicon compounds; sputtering; substrates; 0.15 micron; 0.8 micron; Al; CVD process; RF MEMS device; SiON; actuation times; aluminium; complex membrane; high-resistivity silicon substrate; polyimide; sputtering; suspended membrane structure; three-paired-electrodes capacitor; voltage controlled capacitor; Aluminum; Biomembranes; Capacitors; Electrostatic measurements; Fabrication; Sputtering; Tensile stress; Thermal stresses; Voltage control; Voltage-controlled oscillators;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435161
