A MEMS mid-infrared thermal source for NDIR gas analyzers

Author

Xinming, Ji. ; Wu, Feidie ; Xie, Haifen ; Jia, Zhou ; Bao, ZongMing ; Huang, Yiping

Author_Institution

State Key Lab. of ASIC, Fudan Univ., Shanghai, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1731

Abstract

A mid-IR thermal source, based on electrical heating of a platinum film, has been studied. The IR source, with effectively emitting area diameters of 1.6 mm, is obtained from heated platinum thin film resistors deposited on a Si₃N₄/SiO₂ membrane. The IR source can emit wideband infrared light with a peak wavelength of λ=2.62 μm at 1106 K and be adapted to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of the various IR gas sensors and can be regarded as a new thermal IR sources to be used in NDIR (non-dispersive infrared) gas analyzers.

Keywords

electro-optical modulation; emissivity; gas sensors; infrared sources; microsensors; platinum; thin film resistors; 1.6 mm; 1106 K; 2.62 micron; 50 Hz; IR gas sensors; MEMS mid-infrared thermal source; NDIR gas analyzers; Pt-Si₃N₄-SiO₂; emissivity; heat transfer; membrane deposited thin film resistors; modulation frequency; nondispersive IR gas analyzers; platinum film electrical heating; thermal radiation; variable voltage direct modulation; wideband IR emission; Biomembranes; Infrared heating; Micromechanical devices; Optical modulation; Platinum; Resistance heating; Resistors; Semiconductor thin films; Sputtering; Wideband;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435167

Filename

1435167