A fully CMOS compatible integrated absolute pressure sensor

Author

Zhou, Min-Xin ; Huang, Qing-An ; Qin, Ming

Author_Institution

Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1816

Abstract

This paper presents a fully CMOS technology integrated capacitive absolute pressure sensor with on-chip switched capacitor integration circuitry for barometric applications. The overall sensor system process merges CMOS IC technology and a bulk micromachining process utilized after the pre-CMOS process, thus it does not change the IC technology sequence. The sensor consists of a switched capacitor interface readout circuit, a sandwich-structured capacitive transducer with a composite-membrane and a reference capacitor, all integrated on the same chip by a standard CMOS process.

Keywords

CMOS integrated circuits; barometers; capacitive sensors; micromachining; microsensors; pressure sensors; readout electronics; switched capacitor networks; barometric measurements; bulk micromachining process; capacitive absolute pressure sensor; composite-membrane; integrated CMOS compatible pressure sensor; interface readout circuit; microsensors; on-chip switched capacitor integration circuitry; reference capacitor; sandwich-structured capacitive transducer; CMOS integrated circuits; CMOS process; CMOS technology; Capacitive sensors; Integrated circuit technology; Micromachining; Sensor systems; Switched capacitor circuits; Switching circuits; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435187

Filename

1435187