Flatness-based control of an electrostatic torsional micro-mirror with voltage feedback

Author

Agudelo, C.-G. ; Zhu, G. ; Packirisam, M. ; Saydy, L.

Author_Institution

Ecole Polytech. de Montreal, Montreal

fYear

2007

fDate

5-8 Aug. 2007

Firstpage

654

Lastpage

657

Abstract

Electrostatic micro-mirrors are typically modelled in terms of the tilt angle, the angular velocity, and the electrical charge on the device. Although from a theoretical point of view this is a convenient choice, it is not practical due to the ensuing low resolution and the complexity of implementation related to charge measurement. The present paper addresses the practical control of a micro-mirror with the voltage across the device as a state variable. The technique of flat systems is employed to construct a closed-loop scheme for tracking control. Experimental testing results conducted on a scanning micro-mirror demonstrate that the developed control scheme can achieve good performance.

Keywords

closed loop systems; electrostatic devices; micromirrors; tracking; charge measurement; closed-loop scheme; electrostatic torsional micro-mirror; flatness-based control; tracking control; voltage feedback; Angular velocity; Capacitance; Charge measurement; Control systems; Electrodes; Electrostatics; Industrial engineering; Linear feedback control systems; Voltage control; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2007. MWSCAS 2007. 50th Midwest Symposium on

Conference_Location

Montreal, Que.

ISSN

1548-3746

Print_ISBN

978-1-4244-1175-7

Electronic_ISBN

1548-3746

Type

conf

DOI

10.1109/MWSCAS.2007.4488664

Filename

4488664