DocumentCode
3268035
Title
Predictive Simulation For Nanoscale Silicon Technology
Author
Pinto, M. ; Alam, M. ; Bude, J. ; Vuong, Raffertym H -H
fYear
1997
fDate
3-5 Jun 1997
Firstpage
232
Lastpage
232
Keywords
Computational modeling; Fasteners; Manufacturing processes; Physics computing; Predictive models; Research and development; Semiconductor device manufacture; Semiconductor process modeling; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
ISSN
1524-766X
Print_ISBN
0-7803-4131-7
Type
conf
DOI
10.1109/VTSA.1997.614764
Filename
614764
Link To Document