Title :
Kinetics of impurity free vacancy disordering in GaAs/AlGaAs heterostructures
Author :
Helmy, A.Saher ; Aitchison, J.S. ; Marsh, J.H.
Author_Institution :
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
Abstract :
Despite the increasing use of the technology of intermixing of quantum confined heterostructures to fabricate optoelectronic and photonic integrated circuits, the majority of research to date has been directed at experimental investigations of the processes. Although the concept was first reported in 1981 no comprehensive mechanism of the process was presented until 1988. The model described here allows a non-equilibrium group III vacancy concentration in a GaAs-AlGaAs heterostructure to be related to the amount of intermixing induced during subsequent annealing
Keywords :
III-V semiconductors; aluminium compounds; chemical interdiffusion; diffusion; gallium arsenide; semiconductor device models; semiconductor quantum wells; GaAs-AlGaAs; GaAs-AlGaAs heterostructure; GaAs/AlGaAs heterostructures; annealing; impurity free vacancy disordering kinetics model; non-equilibrium group III vacancy concentration; photonic integrated circuits; quantum confined heterostructure intermixing; Annealing; Artificial intelligence; Dielectrics; Gallium arsenide; Impurities; Integrated circuit technology; Kinetic theory; Lattices; Photonic integrated circuits; Potential well;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.645509