Title :
Low-voltage high-isolation RF MEMS switch based on a single crystalline silicon structure with fine gap vertical comb
Author :
Moon, Sungsoo ; Kim, Hyeon Cheol ; Chun, Kukjin
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea
Abstract :
We have designed and fabricated an RF MEMS switch which has -50dB isolation at 2.4 GHz and 6 V operation voltage.
Keywords :
elemental semiconductors; microswitches; nanostructured materials; silicon; 2.4 GHz; 6 V; Si; fine gap vertical comb; low-voltage high-isolation RF MEMS switch; single crystalline silicon; Contacts; Coplanar waveguides; Crystallization; Fabrication; Packaging; Radiofrequency microelectromechanical systems; Silicon; Switches; Voltage; Wafer bonding;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203843
