DocumentCode
3272006
Title
Mesoscopic optical instrumentation: a miniature Fourier transform spectrometer
Author
González, C. ; Smith, R.L. ; Collins, S.D. ; Sirota, M.
Author_Institution
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Volume
2
fYear
1997
fDate
10-13 Nov 1997
Firstpage
474
Abstract
We present a general methodology for the realization of practical micro-optical systems, specifically, a miniature Fourier transform spectrometer, through the use of a newly developed microfabrication technique called microjoinery. Using microjoinery, we have microfabricated a number of translational and positioning stages ideally suited for use in micro-optical systems
Keywords
Fourier transform spectrometers; mesoscopic systems; optical fabrication; mesoscopic optical instrumentation; microfabrication technique; miniature Fourier transform spectrometer; positioning stages; practical micro-optical systems; translational stages; Fourier transforms; Instruments; Mirrors; Optical devices; Optical films; Optical interferometry; Optical recording; Silicon; Space technology; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location
San Francisco, CA
ISSN
1092-8081
Print_ISBN
0-7803-3895-2
Type
conf
DOI
10.1109/LEOS.1997.645524
Filename
645524
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