Title :
Manipulation using 3-D nano-manipulator fabricated by FIB-CVP in the nano-factory
Author :
Kometani, Reo ; Hoshino, Takashi ; Kanda, Kazuhiro ; Haruyama, Y. ; Kaito, Takashi ; Fujita, Jun-ichi ; Ochiai, Yuya ; Matsui, Shinji
Author_Institution :
Graduate Sch. of Sci., Hyogo Univ., Japan
Abstract :
We will report on the movement characteristics of the 3-D nano-manipulator fabricated by FIB-CVD and the manipulation of nano-parts with various structures and materials by using the 3-D nano-manipulator in the nano-factory.
Keywords :
chemical vapour deposition; focused ion beam technology; manipulators; nanotechnology; 3D nano-manipulator; FIB-CVP; nano-factory; Fingers; Glass; Manufacturing; Nanotechnology; National electric code; Probes; Production facilities; Tellurium; Tungsten; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
DOI :
10.1109/IMNC.2005.203848
