Title :
MPACVD of GeO2/SiO2 planar waveguide for integrated optics
Author :
Li, Cheng-chung ; Schramm, Jeff ; Han, Hongtao ; Boudreau, Robert ; Bowen, Terry
Author_Institution :
AMP Inc., Harrisburg, PA, USA
Abstract :
Optical communication system requires different functional components for high efficiency and network flexibility. Optical circuits based on low-loss glass waveguide are the practical and promising approaches to integrate both active and passive devices as a single module for fiber interconnection. AMP has acquired from GEC/GPT of U.K. a world-wide exclusive license for technology of microwave plasma assisted chemical vapor deposition (MPACVD) to produce superior quality, low birefringence, low-loss, planar waveguides for integrated optical devices on either silica or silicon substrate
Keywords :
germanium compounds; optical communication equipment; optical fabrication; optical losses; optical planar waveguides; silicon compounds; vapour phase epitaxial growth; GeO2-SiO2; GeO2/SiO2 planar waveguide; MPACVD; Si; SiO2; fiber interconnection; functional components; integrated optical devices; integrated optics; low birefringence; low-loss; low-loss glass waveguide; microwave plasma assisted chemical vapor deposition; network flexibility; optical communication system; passive devices; silica substrate; silicon substrate; single module; world-wide exclusive license; Chemical technology; Glass; Integrated circuit interconnections; Integrated optics; Licenses; Optical devices; Optical fiber communication; Optical fiber devices; Optical interconnections; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.645542
