Title :
A Smart Sampling Scheduling and Skipping Simulator and its evaluation on real data sets
Author :
Yugma, Claude ; Dauzère-Pérès, Stéphane ; Rouveyrol, Jean-Loup ; Vialletelle, Philippe ; Pinaton, Jacques ; Relliaud, Christophe
Author_Institution :
Centre Microelectron. de Provence, Ecole des Mines de St.- Etienne, Gardanne, France
Abstract :
As modern manufacturing technology progresses, measurement tools become scarce resources since more and longer control operations are required. It thus becomes critical to decide whether a lot should be measured or not in order to get as much information as possible on production tools or processes, and to avoid ineffective measurements. To minimize risks and optimize measurement capacity, a smart sampling algorithm has been proposed to efficiently select and schedule production lots on metrology tools. This algorithm and others have been embedded in a simulator called “Smart Sampling Scheduling and Skipping Simulator” (S5). The characteristics of the simulator will be presented. Simulations performed on several sets of instances from three different semiconductor manufacturing facilities (or fabs) will be presented and discussed. The results show that, by using smart sampling, it is possible to drastically improve various factory performance indicators when compared to current fab sampling.
Keywords :
lot sizing; performance index; production equipment; production facilities; sampling methods; scheduling; semiconductor device manufacture; semiconductor device measurement; control operations; fab sampling; factory performance indicators; ineffective measurements; manufacturing technology; measurement capacity; measurement tools; metrology tools; production lots schedule; production processes; production tools; real data sets; semiconductor manufacturing facility; skipping simulator; smart sampling algorithm; smart sampling scheduling; Current measurement; Job shop scheduling; Metrology; Production facilities; Semiconductor device measurement; Time measurement;
Conference_Titel :
Simulation Conference (WSC), Proceedings of the 2011 Winter
Conference_Location :
Phoenix, AZ
Print_ISBN :
978-1-4577-2108-3
Electronic_ISBN :
0891-7736
DOI :
10.1109/WSC.2011.6147904