Integration of terahertz quantum cascade lasers with lithographically micromachined waveguides

Author

Wanke, Michael C. ; Nordquist, Christopher ; Arrington, Christian L. ; Rowen, Adam M. ; Grine, Albert D. ; Shaner, Eric A. ; Lee, Mark

Author_Institution

Sandia Nat. Labs., Albuquerque, NM

fYear

2008

fDate

15-19 Sept. 2008

Firstpage

1

Lastpage

1

Abstract

Gold rectangular waveguides suitable for single mode operation at frequencies near 3 THz have been micromachined using silicon microfabrication methods. The design, fabrication, and loss characteristics of these waveguides will be presented. On-chip integration of these waveguide structures with THz quantum cascade laser (QCL) sources has been achieved and the characteristics of QCL beams guided by waveguide will be discussed.

Keywords

elemental semiconductors; integrated optics; micro-optomechanical devices; micromachining; optical design techniques; optical fabrication; optical losses; optical waveguides; quantum cascade lasers; silicon; submillimetre wave lasers; Si; gold rectangular waveguides; lithographically micromachined waveguides; on-chip integration; silicon microfabrication methods; terahertz quantum cascade lasers; Design methodology; Frequency; Laboratories; Laser beams; Optical device fabrication; Quantum cascade lasers; Rectangular waveguides; Shape measurement; Silicon; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on

Conference_Location

Pasadena, CA

Print_ISBN

978-1-4244-2119-0

Electronic_ISBN

978-1-4244-2120-6

Type

conf

DOI

10.1109/ICIMW.2008.4665539

Filename

4665539