DocumentCode
3279182
Title
The Thermodynamic Model as Common Base for Modeling Integrated Microsensors and Smart Electronic Devices
Author
Wachutka, Gerhard
Author_Institution
ETH-Honggerberg
fYear
1992
fDate
31 May-1 Jun 1992
Firstpage
71
Lastpage
76
Keywords
Actuators; Chemical sensors; Equations; Integrated circuit modeling; Magnetosphere; Microsensors; Object oriented modeling; Signal processing; Space technology; Thermodynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN
0-7803-0516-7
Type
conf
DOI
10.1109/NUPAD.1992.673849
Filename
673849
Link To Document