DocumentCode :
3279982
Title :
A system level modeling method for a MEMS variable cross-section beam driven by electrostatic force
Author :
Liu, Tian-yi ; Li, Wei-Hua ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS of the Minist. of Educ., Southeast Univ., Nanjing, China
fYear :
2009
fDate :
25-28 Oct. 2009
Firstpage :
234
Lastpage :
237
Abstract :
A thin variable cross section beam is usually clamped at both ends. An electrostatic voltage applied to the electrode pad directly underneath the beam leads to a two-dimensional 2-D effect. The electrostatic energy stored in the capacitive beam-pad dielectric gap is decoupled from the mechanical deformation of the beam. A novel method was put forward here in order to describe this 2-D effect. Three improvements are taken into account. The simulations by a finite element method (FEM) CoventorWare have been compared with the novel model, and the error has been limited within 12%. It is shown that the 2-D model for the variable cross-section beam would be useful.
Keywords :
deformation; electrostatic devices; finite element analysis; micromechanical devices; 2-D model; MEMS variable cross-section beam; capacitive beam-pad dielectric gap; electrode pad; electrostatic force; finite element method CoventorWare; mechanical deformation; system level modeling method; two-dimensional effect; Dielectrics; Electrodes; Electrostatics; Force control; Force sensors; Laboratories; Micromechanical devices; Optical switches; Two dimensional displays; Voltage; 2-D model; MEMS; Two-dimensional effect; Variable cross-section beam;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
ISSN :
1930-0395
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2009.5398182
Filename :
5398182
Link To Document :
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