Linearity and heat resisting improvement low-voltage fluid-based inclination sensor by using silica coating process

In this paper, we proposed a sealing technique for a sealing glass cap with a ceramic substrate by using silica coating liquid to increase the performance of fluid-based inclination sensor in heat-resisting and durability characteristic. The sensor was developed with one-side-electrode-type structure and propylene carbonate was used as electrolyte. The sensor uses capacitance change to detect the angle of inclination, and it is capable measuring inclination at supply voltage 1.5 V. The diameter of glass cap and height were 4.0 mm and 2.0 mm, respectively. The linearity of characteristic can be improved when the supply voltage was set at 1.5 V. The sensitivity, response time and resolution of sensor were 4 mV/deg, 0.6 s and 1.8 deg, respectively at the supply voltage 1.5 V. The temperature characteristic was evaluated between -10°C to 50°C.