Arbitrary axis rotating surface acoustic wave micro motor

Author

Tjeung, Ricky T. ; Hughes, Mark S. ; Yeo, Leslie Y. ; Friend, James R.

Author_Institution

Micro/Nanophysics Res. Lab., Monash Univ., Clayton, VIC, Australia

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

180

Lastpage

183

Abstract

We present a surface acoustic wave (SAW) actuated rotating micro motor. The rotors are 1 millimeter metal spheres which are placed on the surface of a Lead Zirconate Titanate (PZT) substrate with IDTs designed to generate SAW with ~ 700 μm wavelength. A Laser Doppler Vibrometer (LDV) was used to visualize the travelling SAW and the result was compared with the rotation of the rotor. The motor transient responses are presented, along with its torque-speed curve. The maximum rotational speed and torque reported were ~1000 rpm and ~14 μN.mm, respectively. Arbitrary motions have also been demonstrated utilizing a magnetic pre-load and multiple IDTs activation.

Keywords

micromotors; substrates; surface acoustic wave devices; vibration measurement; arbitrary axis rotating surface acoustic wave micromotor; laser Doppler vibrometer; lead zirconate titanate substrate; motor transient responses; surface acoustic wave actuated rotating micromotor; Optical surface waves; Permanent magnet motors; Rotors; Substrates; Surface acoustic waves; Torque; piezoelectric; rotational micro motor; surface acoustic wave; ultrasonics motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017324

Filename

6017324