Title :
Resonant MEMS magnetometer with capacitive read-out
Author :
Thompson, Matthew J. ; Horsley, David A.
Author_Institution :
Mech. & Aerosp. Eng., Univ. of California, Davis, Davis, CA, USA
Abstract :
Here we demonstrate a Lorentz force driven, resonant SOI MEMS magnetometer operating at atmospheric pressure with a sensitivity of 31.4 mVrms/T, a minimum detectable field of 1.01 ¿T/¿(Hz) and a 3 dB bandwidth of 90 Hz. The noise floor is currently dominated by the detection electronics however the MEMS device alone has a Brownian noise floor of 155 nT/¿(Hz). The resonant magnetometer is modulated at its natural frequency of 8468 Hz and has a quality factor (Q) of 48.8. The premise of this magnetometer is to create an electronic compass with the same fabrication technology used for existing MEMS accelerometers and gyroscopes in order to create a single chip inertial-measurement-unit (IMU).
Keywords :
Q-factor; compasses; magnetometers; micromechanical devices; silicon-on-insulator; Brownian noise; Lorentz force; bandwidth 90 Hz; capacitive read-out; electronic compass; frequency 8468 Hz; pressure 1 atm; quality factor; resonant SOI MEMS magnetometer; single chip inertial-measurement-unit; Bandwidth; Fabrication; Frequency; Lorentz covariance; Magnetic modulators; Magnetometers; Microelectromechanical devices; Micromechanical devices; Q factor; Resonance;
Conference_Titel :
Sensors, 2009 IEEE
Conference_Location :
Christchurch
Print_ISBN :
978-1-4244-4548-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2009.5398216
