Title :
Effect of parasitic resistance on a MEMS vibratory gyroscopes due to temperature fluctuations
Author :
Hou, Zhanqiang ; Xiao, Dingbang ; Wu, Xuezhong ; Dong, Peitao ; Niu, Zhengyi ; Zhou, Zelong ; Zhang, Xu
Author_Institution :
Coll. of Mechatron. Eng. & Autom., Nat. Univ. of Defense Technol., Changsha, China
Abstract :
Parasitic resistance is one of the most prevalent error sources preventing the performance of MEMS vibratory gyroscopes. This paper reports the effect of parasitic resistance on the performance of a MEMS vibratory gyroscope which is suspended with a slanted cantilever. The parasitic resistance and capacitance of the micromachined gyroscope were analyzed. The electrical model of the overall system was built. The transfer function of the gyroscope was derived as a parallel connection of a mass-spring-damper model and a R-C network made of parasitic resistance and capacitance. The parasitic resistance affects on the performance of the frequency response was simulated. The temperature characteristic of the frequency response was tested, which is in accordance with the simulated results. The gain of the frequency response changed about 20% in dBs over the range of 30°C to 60°C.
Keywords :
cantilevers; gyroscopes; micromachining; microsensors; MEMS vibratory gyroscopes; R-C network; error sources; micromachined gyroscope; parasitic resistance; slanted cantilever; temperature 30 degC to 60 degC; temperature fluctuations; Capacitance; Frequency response; Gyroscopes; Micromechanical devices; Resistance; Temperature; Temperature sensors; MEMS vibratory gyroscope; frequency response; parasitic capacitance; parasitic resistance; temperature characteristic;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017351
