Title :
Scattering of laser irradiating on nanoscale rectangular groove
Author :
Ho, Ching-Yen ; Tsai, Yu-Hsiang ; Wen, Mao-Yu
Author_Institution :
Dept. of Mech. Eng., Hwa Hsia Inst. of Technol., Taipei, Taiwan
Abstract :
The scattering of laser irradiating on nanoscale rectangular groove is investigated in this paper. The laser incident on the groove is partially reflected and absorbed for an opaque material. This possibly leads to the absorption enhancement and redistribution of the laser in the groove. Micro- and nano-scale structures usually occur in MENS and nano-technology. Therefore it is important for the development of MENS and nano-technology to understand the scattering of the laser in these microstructures. Using the classical electromagnetic wave theory, the scattering of the laser in a nanoscale rectangular groove is analyzed and the scale effect on the scattering of the laser is also discussed.
Keywords :
laser beams; light scattering; nanophotonics; absorption enhancement; laser irradiation scattering; micro-scale structure; nano-scale structure; nanoscale rectangular groove; opaque material; Laser theory; Nanoscale devices; Optical surface waves; Scattering; Surface impedance; Surface waves; LASER; NANOSCALE GROOVE; SCATTERING;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
DOI :
10.1109/NEMS.2011.6017390
