On-chip 2-axis optical fiber actuator using gray-scale technology

We report an on-chip method for actuating an optical fiber in 2-axes. Opposing comb-drive actuators with integrated 3-D wedges (fabricated using gray-scale technology (Morgan, 2004)) create a translatable, variable height v-groove to alter the horizontal and vertical alignment of an optical fiber cantilever. Actuation of a cleaved fiber tip over a diamond shaped area >35mum in each direction is demonstrated. The design, fabrication, and testing results presented here clearly demonstrate this actuator´s ability to precisely control the position of an optical fiber in 2-axes, an essential capability for on-chip fiber alignment mechanisms in optoelectronic packaging