Development of PVdF based pressure sensor for low pressure application

Author

Mahale, Bhoopesh P. ; Bodas, Dhananjay ; Gangal, S.A.

Author_Institution

Dept. of Electron. Sci., Univ. of Pune, Pune, India

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

658

Lastpage

661

Abstract

Development of poly(vinyl difluoride) (PVdF) based dynamic pressure sensor for low pressure application is reported in the present paper. β-phase PVdF film of thickness 10 μm is fabricated using spin casting method with thermally evaporated Al electrodes (200 nm) on both sides of the film. The film is polled and packaged in a poly(dimethyl siloxane) (PDMS) block. The exposed area of the pressure sensor is ~500μm in diameter. A signal conditioning circuit is designed to amplify the signal and a NI DAQ card with LabVIEW software is used to acquire the signal on a PC. The dynamic pressure response of the sensor is recorded which shows linearity in detection. Pressure measured by the sensor is in the range of 10 to 150kPa.

Keywords

casting; polymers; pressure sensors; signal conditioning circuits; virtual instrumentation; Al electrodes; LabVIEW software; NI DAQ card; PVdF; dynamic pressure sensor; pressure measurement; signal conditioning circuit; size 10 mum; spin casting method; Coatings; Fabrication; Films; Packaging; Temperature sensors; Thermal stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017441

Filename

6017441