DocumentCode
3283255
Title
MEMS-based buoyancy and propelling mechanisms for a micro-submarine
Author
Ku, Che-Ming ; Liao, Hsin-Hung ; Yang, Yao-Joe
Author_Institution
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2011
fDate
20-23 Feb. 2011
Firstpage
744
Lastpage
747
Abstract
In this work, we developed a MEMS-based micro-submarine which the thermopneumatic mechanism is used to control the movement of sink and float. The equivalent circuit model of the thermopneumatic mechanism is formulated. The analytical solution for predicting the buoyancy of the submarine is also derived. A propelling method is also proposed. The dimensions of the micro-submarine are 2.29 mm × 3.70 mm × 0.71 mm. The micro-submarine motion of sinking, floating and moving forward are also demonstrated.
Keywords
equivalent circuits; micromechanical devices; motion control; pneumatic control equipment; semiconductor device models; MEMS-based buoyancy mechanism; MEMS-based microsubmarine; equivalent circuit model; float; movement control; propelling mechanism; sink; thermopneumatic mechanism; Glass; Propulsion; Resistance heating; Substrates; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location
Kaohsiung
Print_ISBN
978-1-61284-775-7
Type
conf
DOI
10.1109/NEMS.2011.6017461
Filename
6017461
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