DocumentCode :
3284347
Title :
Nanosystems - The Next MEMS Revolution
Author :
Polla, Dennis L.
fYear :
2005
fDate :
Dec. 7-9, 2005
Firstpage :
256
Lastpage :
256
Keywords :
Chemical technology; Electronics packaging; Intelligent actuators; Intelligent sensors; Manufacturing processes; Microelectromechanical systems; Micromechanical devices; Nanobioscience; Nanoelectromechanical systems; Sensor systems;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Device Research Symposium, 2005 International
Print_ISBN :
1-4244-0083-X
Type :
conf
DOI :
10.1109/ISDRS.2005.1596081
Filename :
1596081
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3284347
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