DocumentCode
3284569
Title
Athermal Annealing of Ion-implanted SiC
Author
Mulpuri, K.B. ; Qadri, S.B. ; Grun, J. ; Ridgway, M.C.
fYear
2005
fDate
Dec. 7-9, 2005
Firstpage
284
Lastpage
285
Keywords
Acoustic pulses; Annealing; Area measurement; Electric resistance; Electrical resistance measurement; Optical pulse generation; Optical pulses; Plasma temperature; Silicon carbide; Thermal resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2005 International
Print_ISBN
1-4244-0083-X
Type
conf
DOI
10.1109/ISDRS.2005.1596096
Filename
1596096
Link To Document