DocumentCode :
3284594
Title :
An asymmetric PI hysteresis model for piezoceramics in nanoscale AFM imaging
Author :
Wang, Dong ; Dong, Zaili ; Jiao, Niandong ; Yuan, Shuai ; Zhou, Lei ; Li, Wen J.
Author_Institution :
State Key Lab. of Robot., Chinese Acad. of Sci., Shenyang, China
fYear :
2011
fDate :
20-23 Feb. 2011
Firstpage :
1075
Lastpage :
1079
Abstract :
A modified Prandtl-Ishlinskii (PI) model, referred to as an asymmetric PI model, is implemented to reduce the displacement error between the model and the actual trajectory of a piezoceramic actuator used for AFM-based nanoscale imaging. The fact that the standard PI model is symmetric, while the actual hysteresis loop of a piezoceramic actuator is asymmetric, assures scanning errors if the standard PI operator is used. In order to improve the accuracy of the model, instead of using the same slope values in the entire PI model, different slope values to describe the forward loop (voltage increase) and the backward loop (voltage decrease) is proposed. The accuracy of the asymmetric PI model is validated on a custom-built AFM by comparing the experimental results derived from it with the results for the standard PI model.
Keywords :
atomic force microscopy; dielectric hysteresis; nanoelectromechanical devices; nanopositioning; piezoceramics; piezoelectric actuators; AFM based nanoscale imaging; asymmetric PI hysteresis model; backward loop; displacement error; forward loop; modified Prandtl-Ishlinskii model; nanoscale AFM imaging; piezoceramic actuator; piezoceramics; Actuators; Computational modeling; Correlation; Feedforward neural networks; Hysteresis; Imaging; Piezoelectric materials; AFM hysteresis; AFM imaging; Nano-manipulation; nano-imaging; piezo-actuator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location :
Kaohsiung
Print_ISBN :
978-1-61284-775-7
Type :
conf
DOI :
10.1109/NEMS.2011.6017543
Filename :
6017543
Link To Document :
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