• DocumentCode
    3285487
  • Title

    Temperature measurement through protective glass

  • Author

    Babikov, A.A. ; Zakharenko, V.A.

  • Volume
    01
  • fYear
    2008
  • fDate
    23-25 Sept. 2008
  • Firstpage
    182
  • Lastpage
    182
  • Abstract
    Experimental results and theoretical considerations concerning contactless measurement of temperature through the protective glass of the reactor in the production of technical carbon are presented.
  • Keywords
    glass; temperature measurement; protective glass; technical carbon; temperature measurement; Etching; Glass; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma temperature; Protection; Silicon; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Instrument Engineering, 2008. APEIE 2008. 9th International Conference on Actual Problems of
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-2825-0
  • Type

    conf

  • DOI
    10.1109/APEIE.2008.4897089
  • Filename
    4897089