DocumentCode
3285487
Title
Temperature measurement through protective glass
Author
Babikov, A.A. ; Zakharenko, V.A.
Volume
01
fYear
2008
fDate
23-25 Sept. 2008
Firstpage
182
Lastpage
182
Abstract
Experimental results and theoretical considerations concerning contactless measurement of temperature through the protective glass of the reactor in the production of technical carbon are presented.
Keywords
glass; temperature measurement; protective glass; technical carbon; temperature measurement; Etching; Glass; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma temperature; Protection; Silicon; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Instrument Engineering, 2008. APEIE 2008. 9th International Conference on Actual Problems of
Conference_Location
Novosibirsk
Print_ISBN
978-1-4244-2825-0
Type
conf
DOI
10.1109/APEIE.2008.4897089
Filename
4897089
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