Title :
Laser microstructuring of congruent lithium niobate by UV ps-pulses
Author :
Stolze, Mareike ; Herrmann, Thomas ; Weigand, Benjamin ; L´huillier, Johannes
Author_Institution :
Photonik-Zentrum Kaiserslautern e.V., Kaiserslautern, Germany
Abstract :
We present single shot experiments at different pulse energies for LiNbO3 on c+-side and c--side by using a laser wavelength of 355 nm and a pulse duration of about 10 ps. Furthermore, we demonstrate laser micromachined grooves with high spatial pulse overlap on the c+-side of LiNbO3. Here a (rms) sidewall roughness as low as 20 nm has been achieved at an ablation depth of 1.2μm.
Keywords :
ferroelectric materials; laser ablation; laser beam machining; lithium compounds; micromachining; surface roughness; LiNbO3; UV ps-pulses; congruent lithium niobate; depth 1.2 mum; ferroelectric materials; laser ablated surfaces; laser micromachined grooves; laser microstructuring; single shot experiments; wavelength 355 nm; Laser ablation; Laser theory; Lithium niobate; Materials; Optical waveguides; Surface emitting lasers; Waveguide lasers; Picosecond laser ablation; crystal orientation; ridge waveguide; surface roughness;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297765
