Title :
Influence of annealing temperature on properties of Mn/Y co-doped Ba0.67Sr0.33TiO3 thin film prepared by RF magnetron sputtering
Author :
Xu, Zunping ; Chen, Xiaoyang ; Zhu, Jianguo ; Xiao, Dingquan ; Yu, Ping
Author_Institution :
Coll. of Mater. Sci. & Eng, Sichuan Univ., Chengdu, China
Abstract :
Mn/Y co-doped Ba0.67Sr0.33TiO3 (Mn+Y: BST) thin films were deposited on LaNiO3 (LNO)/SiO2/Si substrates by radio frequency (RF) magnetron sputtering at substrate temperature of 400 °C. Influence of the annealing temperature on microstructure and electrical properties of the Mn+Y: BST films was investigated. X-ray diffraction (XRD) and scanning electron microscopy (SEM) investigations revealed that all the films have dense and crack-free surface with a perovskite structure. The Mn+Y: BST films annealed at 700 °C showed the best electrical properties, with a dielectric constant of 875, dielectric loss of 0.032, tunability of 60% at room temperature and 100 kHz, and the leakage current density of 6.7×10-5 A/cm2 at an electric field of 400 kV/cm, respectively.
Keywords :
X-ray diffraction; annealing; barium compounds; crystal microstructure; current density; dielectric losses; dielectric thin films; leakage currents; manganese; permittivity; scanning electron microscopy; sputter deposition; strontium compounds; yttrium; Ba0.67Sr0.33TiO3:Mn,Y; LaNiO3-SiO2-Si; RF magnetron sputtering; SEM; X-ray diffraction; XRD; annealing temperature; crack-free surface; dense surface; dielectric constant; dielectric loss; electrical properties; frequency 100 kHz; leakage current density; microstructure; perovskite structure; radiofrequency magnetron sputtering; scanning electron microscopy; temperature 293 K to 298 K; temperature 400 degC; temperature 700 degC; thin film; tunability; Annealing; Dielectric constant; Dielectric losses; Films; Leakage current; Temperature; Annealing temperature; BST thin films; Electrical properties;
Conference_Titel :
Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp
Conference_Location :
Aveiro
Print_ISBN :
978-1-4673-2668-1
DOI :
10.1109/ISAF.2012.6297790
