• DocumentCode
    3288014
  • Title

    Analytical model for the threshold voltage of dual material gate (DMG) partially depleted SOI MOSFET and evidence for reduced short-channel effects

  • Author

    Kumar, M. Jagadesh ; Reddy, G. Venkateshwar

  • Author_Institution
    Dept. of Electr. Eng., Indian Inst. of Technol., New Delhi, India
  • Volume
    2
  • fYear
    2004
  • fDate
    18-21 Oct. 2004
  • Firstpage
    1204
  • Abstract
    We propose a unique two dimensional analytical model of a dual material gate partially depleted (DMG-PD) SOI MOSFET. The model includes the calculation of the surface potential, electric field along the channel and threshold voltage using the minimum surface potential. The model takes into account the effects of body doping concentration, gate oxide, buried oxide and silicon film thickness, lengths of the gate metals and their work functions, applied drain and substrate biases. It is seen that the short channel effects in this structure arc diminished because of the step in the surface potential profile which screens the drain potential variations. The results predicted by the model are verified using accurate two-dimensional numerical simulations.
  • Keywords
    MOSFET; semiconductor device models; semiconductor doping; silicon-on-insulator; substrates; surface potential; DMG-PD SOI MOSFET; body doping concentration; buried oxide; dual material gate; gate oxide; partially depleted SOI MOSFET; reduced short-channel effects; silicon film thickness; substrate bias; surface potential; threshold voltage; Analytical models; Doping; Electric potential; MOSFET circuits; Predictive models; Semiconductor films; Semiconductor process modeling; Silicon; Substrates; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
  • Print_ISBN
    0-7803-8511-X
  • Type

    conf

  • DOI
    10.1109/ICSICT.2004.1436745
  • Filename
    1436745