DocumentCode
3288014
Title
Analytical model for the threshold voltage of dual material gate (DMG) partially depleted SOI MOSFET and evidence for reduced short-channel effects
Author
Kumar, M. Jagadesh ; Reddy, G. Venkateshwar
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol., New Delhi, India
Volume
2
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1204
Abstract
We propose a unique two dimensional analytical model of a dual material gate partially depleted (DMG-PD) SOI MOSFET. The model includes the calculation of the surface potential, electric field along the channel and threshold voltage using the minimum surface potential. The model takes into account the effects of body doping concentration, gate oxide, buried oxide and silicon film thickness, lengths of the gate metals and their work functions, applied drain and substrate biases. It is seen that the short channel effects in this structure arc diminished because of the step in the surface potential profile which screens the drain potential variations. The results predicted by the model are verified using accurate two-dimensional numerical simulations.
Keywords
MOSFET; semiconductor device models; semiconductor doping; silicon-on-insulator; substrates; surface potential; DMG-PD SOI MOSFET; body doping concentration; buried oxide; dual material gate; gate oxide; partially depleted SOI MOSFET; reduced short-channel effects; silicon film thickness; substrate bias; surface potential; threshold voltage; Analytical models; Doping; Electric potential; MOSFET circuits; Predictive models; Semiconductor films; Semiconductor process modeling; Silicon; Substrates; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1436745
Filename
1436745
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