DocumentCode

3288256

Title

Modeling of Gas Flow in Rotary Ozonizer

Author

Potapov, S.A. ; Alyshev, S.V.

fYear

2006

fDate

26-28 Sept. 2006

Firstpage

266

Lastpage

266

Keywords

Anisotropic magnetoresistance; Atomic measurements; Etching; Fluid flow; Frequency; Gases; Mercury (metals); Noise generators; Silicon; Solids;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Instrument Engineering, 2006. APEIE '06. 8th International Conference on Actual Problems of

Conference_Location

Novosibirsk, Russia

Print_ISBN

5-7782-0662-3

Type

conf

DOI

10.1109/APEIE.2006.4292456

Filename

4292456