• DocumentCode
    3290288
  • Title

    [Breaker page]

  • fYear
    2006
  • fDate
    24-27 May 2006
  • Abstract
    Breaker page.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
  • Conference_Location
    Lviv
  • Print_ISBN
    966-553-517-X
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2006.288691
  • Filename
    4068455