Title :
Role of surface states in field emission from silicon
Author_Institution :
Microelectron. Center, Southeast Univ., Nanjing, China
Abstract :
Field emission from surface states is modelled and numerically estimated. Field emission current from surface states is dominant at lower fields while field emission current from the conduction band is dominant at higher fields due to insufficient electrons supplied for surface states
Keywords :
electron field emission; elemental semiconductors; silicon; space charge; surface states; vacuum microelectronics; Si; conduction band; field emission current; surface states; Charge carrier processes; Electron emission; Impurities; Microelectronics; Poisson equations; Silicon; Space charge; State estimation; Surface cleaning; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601794
