DocumentCode
329143
Title
Confined Selective Epitaxial Growth: Potential For Smart Silicon Sensor Fabrication
Author
Bartek, M. ; Gennissen, P.T.J. ; French, P.J. ; Wolffenbuttel, R.F.
Author_Institution
Delft University of Technology
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
91
Lastpage
94
Keywords
Annealing; Cleaning; Epitaxial growth; Etching; Fabrication; Intelligent sensors; Plasma applications; Plasma chemistry; Silicon on insulator technology; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717099
Filename
717099
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