DocumentCode

329151

Title

Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining

Author

van Drieenhuizen, B.P. ; Wolffenbuttel, R.F.

Author_Institution

Delft University of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

130

Lastpage

133

Keywords

Bridge circuits; Capacitance; Capacitors; Damping; Electrodes; Electrostatics; Fabrication; Impedance; Micromachining; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717110

Filename

717110