DocumentCode

329159

Title

Fast 3d Laser Micromachining Of Silicon For Micromechanical And Microfluidic Applications

Author

Müllenborn, M. ; Dirac, H. ; Petersen, J.W. ; Bouwstra, S.

Author_Institution

Danmarks Tekniske Universitet

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

166

Lastpage

169

Keywords

Atmosphere; Biomembranes; Etching; Laser beam cutting; Laser beams; Microfluidics; Micromachining; Micromechanical devices; Prototypes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717124

Filename

717124