DocumentCode

329165

Title

Boron Etch-stop In TMAH Solutions

Author

Steinsland, Elin ; Nese, Martin ; Hanneborg, Anders ; Bernstein, R.W. ; Sandmo, Halle ; Kittilsland, Gjermund

Author_Institution

Univerity of Oslo

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

190

Lastpage

193

Keywords

Anisotropic magnetoresistance; Boron; Doping profiles; Etching; Glass; Ion implantation; Lithography; Silicon; Temperature; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717135

Filename

717135