DocumentCode
329187
Title
Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor
Author
Ikeda, Masaaki ; Goto, Hiroshi ; Sakata, Minoru ; Wakabayashi, Syuichi ; Imanaka, Koichi ; Takeuchi, Masashi ; Yada, Tuneji
Author_Institution
OMRON Corporation
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
293
Lastpage
296
Keywords
Integrated optics; Mirrors; Optical beams; Optical resonators; Optical sensors; Piezoelectric actuators; Piezoresistance; Resonance; Silicon; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717176
Filename
717176
Link To Document