Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos Process

Author

Fischer, M. ; Nagele, M. ; Eichner, D. ; Schollhorn, Claus ; Strobel, R.

Author_Institution

Universitat Stuttgart

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

305

Lastpage

307

Keywords

Actuators; Aluminum; CMOS process; CMOS technology; Circuits; Electrodes; Metallization; Micromachining; Mirrors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717179

Filename

717179

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