DocumentCode

329192

Title

Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga Process

Author

Rogge, B. ; Schulz, J. ; Mohr, J. ; Thommes, A. ; Menz, W.

Author_Institution

Forschungszentrum Karlsruhe

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

320

Lastpage

323

Keywords

Coils; Magnetic cores; Magnetic flux; Micromagnetics; Microrelays; Optical device fabrication; Optical sensors; Relays; Springs; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717183

Filename

717183