DocumentCode

329201

Title

Micromachined Optical Circular Gratings For Surface Light-emitting Devices

Author

Noda, Susumu ; Ishikawa, Tsutomu ; Sasaki, Akio

Author_Institution

Kyoto University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

351

Lastpage

354

Keywords

Electron beams; Electron optics; Gratings; Indium phosphide; Optical devices; Optical sensors; Particle beam optics; Resists; Stimulated emission; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717199

Filename

717199