DocumentCode
329208
Title
A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation
Author
Toshiyoshi, Hiroshi ; Kobayashi, Dai ; Fujita, Hiroyuki ; Ueda, Toshitsugu
Author_Institution
The University of Tokyo
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
389
Lastpage
392
Keywords
Anisotropic magnetoresistance; Electrodes; Etching; Microactuators; Piezoelectric actuators; Resonance; Scanning electron microscopy; Shape; Suspensions; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717214
Filename
717214
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