DocumentCode

329213

Title

Self-excited Piezoelectric Cantilever Oscillators

Author

Lee, Seung S. ; White, Richard M.

Author_Institution

University of California, Berkeley

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

417

Lastpage

420

Keywords

Acoustic transducers; Annealing; Biomembranes; Electrodes; Frequency; Oscillators; Piezoelectric transducers; Residual stresses; Silicon; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717226

Filename

717226