Title :
Self-excited Piezoelectric Cantilever Oscillators
Author :
Lee, Seung S. ; White, Richard M.
Author_Institution :
University of California, Berkeley
Keywords :
Acoustic transducers; Annealing; Biomembranes; Electrodes; Frequency; Oscillators; Piezoelectric transducers; Residual stresses; Silicon; Zinc oxide;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717226
