DocumentCode

329217

Title

Batch Fabrication Of Mechanical Platforms For High Density

Author

Fan, L.-S. ; Woodman, S.

Author_Institution

IBM Research Division

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

434

Lastpage

437

Keywords

Actuators; CD recording; Disk drives; Fabrication; Memory; Micromechanical devices; Nonhomogeneous media; Rotors; Springs; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717231

Filename

717231